Optical device, photodetection system, and method for manufacturing the same
AssigneePanasonic Intellectual Property Management Co., Ltd.
InventorsTakaiki Nomura, Masahiko Tsukuda, Yasuhisa Inada
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AssigneePanasonic Intellectual Property Management Co., Ltd.
InventorsTakaiki Nomura, Masahiko Tsukuda, Yasuhisa Inada
Estimating the term…
An optical device includes a first substrate having a first surface, a second substrate having a second surface, at least one optical waveguide, and a plurality of spacers, disposed on at least either the first surface or the second surface, that include a first portion and a second portion. The first portion of the plurality of elastic spacers is at least one elastic spacer located in a region between the first substrate and the second substrate in which the first substrate and the second substrate overlap each other as seen from an angle parallel with a direction perpendicular to the first surface. The second portion of the plurality of elastic spacers is at least one elastic spacer located in a region in which the first substrate and the second substrate do not overlap each other as seen from an angle parallel with the direction perpendicular to the first surface.
An optical device comprising:
Dependencies are inferred from the claim text.