MEMS type semiconductor gas detection element
AssigneeNew Cosmos Electric Co., Ltd.
InventorsHirokazu Mitsuhashi, Naganori Dogami
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Abstract
The MEMS type semiconductor gas detection element of the invention is a MEMS type semiconductor gas detection element 1 having a MEMS structure, for detecting hydrogen gas, comprising: a substrate 2; a gas sensitive portion 3 mainly made of a metal oxide semiconductor and provided to the substrate 2; a heating portion 4 for heating the gas sensitive portion 3; an inactive film 5 having hydrogen-permselective and formed outside the gas sensitive portion 3; a protective film 6 formed outside the inactive film 5, for suppressing deterioration of the gas sensitive portion 3.
Claims5
A MEMS type semiconductor gas detection element having a MEMS structure, for detecting hydrogen gas, comprising:
- a substrate;
- a gas sensitive portion mainly made of a metal oxide semiconductor and provided to the substrate;
- a heating portion for heating the gas sensitive portion;
- an inactive film having hydrogen-permselective and formed outside the gas sensitive portion;
- and
- a protective film formed outside the inactive film, for suppressing deterioration of the gas sensitive portion,
- characterized in that
- the inactive film comprises a silica film having a siloxane bond, and
- the protective film comprises alumina or a complex oxide containing aluminum and silicon.
Dependencies are inferred from the claim text.