Micromechanical component for a capacitive sensor or switch device

A capacitive sensor or switch device, comprising:

• a micromechanical component, including:
• a substrate having a substrate surface;
• a diaphragm mounted directly or indirectly on the substrate surface, the diaphragm having a self-supporting region that has a diaphragm inner side oriented toward the substrate and a diaphragm outer side oriented away from the substrate, the self-supporting region of the diaphragm being configured to be warped by a force exerted on the diaphragm outer side;
• and
• at least one lever element and at least one first electrode connected to the at least one lever element, the at least one lever element being connected to the diaphragm in such a way that when there is a warping of the self-supporting region of the diaphragm, the at least one lever element is capable of being set into a rotational movement, whereby the at least one connected first electrode is capable of being set into a first adjustment movement oriented at an angle to the substrate surface;
• wherein the at least one lever element and the at least one first electrode connected to the at least one lever element are situated between the substrate surface and the diaphragm inner side of the self-supporting region of the diaphragm.

A production method for a micromechanical component for a capacitive sensor or switch device, comprising the following steps:

• forming a diaphragm, mounted directly or indirectly on a substrate surface of the substrate, having a self-supporting region that has a diaphragm inner side oriented toward the substrate and a diaphragm outer side oriented away from the substrate, such that the self-supporting region of the diaphragm is capable of being warped by a force exerted on the diaphragm outer side;
• and
• forming at least one lever element and at least one first electrode connected to the at least one lever element, the at least one lever element being connected to the diaphragm in such a way that, when there is a warping of the self-supporting region of the diaphragm, the at least one lever element is set into a rotational movement, whereby the at least one connected first electrode is set into a first adjustment movement oriented at an angle to the substrate surface;
• wherein the at least one lever element and the at least one first electrode connected to the at least one lever element are situated between the substrate surface and the diaphragm inner side of the self-supporting region of the diaphragm.

A method for producing a capacitive sensor or switch device, comprising:

• producing a micromechanical component including:
• forming a diaphragm, mounted directly or indirectly on a substrate surface of the substrate, having a self-supporting region that has a diaphragm inner side oriented toward the substrate and a diaphragm outer side oriented away from the substrate, such that the self-supporting region of the diaphragm is capable of being warped by a force exerted on the diaphragm outer side;
• and
• forming at least one lever element and at least one first electrode connected to the at least one lever element, the at least one lever element being connected to the diaphragm in such a way that, when there is a warping of the self-supporting region of the diaphragm, the at least one lever element is set into a rotational movement, whereby the at least one connected first electrode is set into a first adjustment movement oriented at an angle to the substrate surface;
• wherein the at least one lever element and the at least one first electrode connected to the at least one lever element are situated between the substrate surface and the diaphragm inner side of the self-supporting region of the diaphragm.