Method of producing rinsing liquid

An apparatus for producing an aqueous rinsing liquid, the apparatus comprising:

• an electrochemical cell having an anode in an anode chamber and a cathode in a cathode chamber and having an electrical voltage across the anode and cathode, wherein:
• the anode chamber and the cathode chamber are separated by a cation-selective membrane,
• the anode chamber includes an anode chamber inlet configured to receive an aqueous anode chamber feedstock and an anode chamber outlet configured to output an anode chamber output liquid that is water and ozone gas generated in the anode chamber, wherein the aqueous anode chamber feedstock is initially only water,
• the cathode chamber includes a cathode chamber feedstock inlet configured to receive an aqueous cathode chamber feedstock, and
• the aqueous cathode chamber feedstock consists of an aqueous solution of ammonia;
• an anode chamber feedstock source in fluid communication with the anode chamber inlet via a first pipe and configured to initially be filled with only water, provide the aqueous anode chamber feedstock to the anode chamber via the first pipe,
• wherein, during application of the electrical voltage, either i) the anode chamber output liquid is fed from the anode chamber outlet to a waste outlet, or ii) the anode chamber output liquid is recycled as anode chamber feedstock from the anode chamber outlet to the anode chamber feedstock source via a second pipe;
• and
• a cathode chamber feedstock source in fluid communication with the cathode chamber feedstock inlet configured to provide the aqueous cathode chamber feedstock to the cathode chamber.