Process for purifying silicon compounds

A process for purifying a fluid silicon compound comprising:

• 1) combining
• 99.5 weight % to 99.75 weight % of a mixture comprising
• i) a fluid silicon compound comprising a halosilane monomer, and
• ii) an impurity comprising a metal selected from the group consisting of aluminum, titanium, a compound of aluminum, a compound of titanium, or a combination of any two or more thereof, where the impurity is present in an amount sufficient to provide at least 500 ppm of the metal based on weight of the mixture, and
• 0.25 weight % to 0.5 weight % of a tertiary amine;
• thereby forming a product comprising i) the fluid silicon compound and iii) an amine-metal complex;
• and
• 2) combining
• 92 weight % to 98 weight % of the product formed in step 1), and
• 2 weight % to 8 weight % of an activated carbon;
• thereby adsorbing the amine-metal complex with the activated carbon and preparing the purified fluid silicon compound.