Vanox hot water cart conditioning method

A conditioning system for pre-treatment or maintenance of an offline filter module, comprising:

• an inlet fluidly connectable to a source of ultrapure water;
• a heat exchanger configured to heat the ultrapure water comprising a lining formed of a first corrosion resistant material, the heat exchanger positioned downstream from the inlet;
• a magnetically levitated pump in fluid communication with the heat exchanger;
• an outlet positioned downstream from the magnetically levitated pump, the outlet fluidly connectable to the offline filter module positioned downstream from the outlet;
• a channel comprising a lining formed of a second corrosion resistant material, the channel constructed and arranged to bypass the heat exchanger;
• a controller configured to selectively direct the ultrapure water to the heat exchanger or to the channel, the controller being programmable to act responsive to at least one of a concentration of total organic carbon (TOC) in the source of ultrapure water and a concentration of TOC in the ultrapure water at the outlet;
• an inlet sensor electronically connected to the controller configured to detect the concentration of TOC in the source of ultrapure water and an outlet sensor electronically connected to the controller configured to detect the concentration of TOC in the ultrapure water at the outlet;
• and
• a base supporting the heat exchanger, the magnetically levitated pump, the channel, and the controller.