Semiconductor chip manufacturing device and method of manufacturing semiconductor chips
AssigneeMitsubishi Electric Corporation
InventorsTetsuya Uetsuji, Ayumi Fuchida, Masato Suzuki
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AssigneeMitsubishi Electric Corporation
InventorsTetsuya Uetsuji, Ayumi Fuchida, Masato Suzuki
Estimating the term…
In a semiconductor chip manufacturing device which produces a plurality of LD chips by dividing a semiconductor wafer, being placed in a casing in which a fluid medium is filled, on which a block line is formed in advance and also on which a scribed line is inscribed so that a microcrack is formed along the scribed line, the semiconductor chip manufacturing device comprises a reception stage for supporting the semiconductor wafer, and a blade cutting-edge for pressurizing the semiconductor wafer along its crack portion made of the block line or the scribed line, so that the semiconductor wafer is divided into a plurality of LD chips by pressurizing it by means of the blade cutting-edge along the crack portion in the fluid medium.
A semiconductor chip manufacturing device which produces a plurality of laser-diode chips by dividing a semiconductor wafer on which a visually identifiable block line is formed in advance and also on which a scribed line is inscribed so that a microcrack is formed along the scribed line, the semiconductor chip manufacturing device, comprising:
A method of manufacturing semiconductor chips by which a plurality of laser-diode chips is produced by dividing a semiconductor wafer on which a visually identifiable block line is formed in advance and also on which a scribed line is inscribed so that a microcrack is formed along the scribed line, the method of manufacturing semiconductor chips, wherein
Dependencies are inferred from the claim text.