Optical etendue matching methods for extreme ultraviolet metrology
AssigneeKLA Corporation
InventorsZefram Marks, Larissa Juschkin, Daniel C. Wack
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Abstract
An optical characterization system is disclosed. The optical characterization system may comprise a synchrotron source, an optical characterization sub-system, and a sensor configured to receive a projected image from a set of imaging optics. The optical characterization sub-system may include at least the set of illumination optics, a set of imaging optics, and a diffractive optical element, a temporal modulator or an optical waveguide configured to match an etendue of a light beam output by the synchrotron source to the set of illumination optics. A method of matching the etendue of a light beam is also disclosed.
Claims37
An optical characterization system comprising:
- a synchrotron source;
- an optical characterization sub-system including at least:
- a set of illumination optics,
- a set of imaging optics, and
- a diffractive optical element configured to match an etendue of a light beam output by the synchrotron source to the set of illumination optics;
- and
- a sensor configured to receive a projected image from the set of imaging optics.
An optical characterization system comprising:
- a synchrotron source;
- an optical characterization sub-system including at least:
- a set of illumination optics,
- a set of imaging optics, and
- a temporal modulator configured to match an etendue of a light beam output by the synchrotron source to the set of illumination optics;
- and
- a sensor configured to receive a projected image from the set of imaging optics.
An optical characterization system comprising:
- a synchrotron source;
- an optical characterization sub-system including at least:
- a set of illumination optics,
- a set of imaging optics, and
- an optical waveguide configured to match an etendue of a light beam output by the synchrotron source to the set of illumination optics;
- and
- a sensor configured to receive a projected image from the set of imaging optics.
A method of matching an etendue of a light beam in an optical characterization system, comprising:
- generating the light beam using a synchrotron source;
- directing the light beam to a diffractive optical element or a temporal modulator;
- and
- increasing the etendue of the light beam to match a set of illumination optics using the diffractive optical element or the temporal modulator.
Dependencies are inferred from the claim text.