Vibrator element, vibrator device, and method of manufacturing vibrator element

A method of manufacturing a vibrator element, comprising:

• preparing a vibrator element having a base part, and a vibrating arm provided with an arm part which is coupled to the base part, which has a groove opening in a principal surface, and which has an elongated shape, and a weight part which is located at a tip side of the arm part, and which has a weight disposed on the principal surface;
• and
• forming at least one processing scar to the weight by irradiating the weight with a laser beam to thin or remove the weight in a thickness direction of the vibrating arm, wherein
• when an axis which overlaps a center in a width direction of the vibrating arm, and which extends along an extending direction of the vibrating arm is defined as a central axis, and an axis which overlaps a centroid of the vibrating arm, and which extends along the extending direction of the vibrating arm is defined as a centroid axis in a plan view of the principal surface, the processing scar is formed in at least an area at an opposite side to the centroid axis with respect to the central axis in the forming at least one processing scar, and
• S1<S2, an area of the processing scar located at the centroid axis side with respect to the central axis is S1, and an area of the processing scar located at an opposite side to the centroid axis with respect to the central axis is S2.