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US 11,964,915 B2Granted
Ceramic material and wire bonding capillary
AssigneeIndustrial Technology Research Institute
InventorsTien-Heng Huang, Yu-Han Wu, Kuo-Chuang Chiu
Life of this patent
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Abstract
A ceramic material includes zirconia toughened alumina (ZTA), which is doped with zinc ions and other metal ions, in which the other metal ions are chromium (Cr) ions, titanium (Ti) ions, gadolinium (Gd) ions, manganese (Mn) ions, cobalt (Co) ions, iron (Fe) ions, or a combination thereof. The ceramic material may have a hardness of 1600 Hv10 to 2200 Hv10 and a bending strength of 600 MPa to 645 MPa. The ceramic material can be used as wire bonding capillary.
Claims12
A ceramic material, consisting of:
- zirconia toughened alumina (ZTA), which is doped with zinc ions and other metal ions, wherein the other metal ions are chromium (Cr) ions, titanium (Ti) ions, gadolinium (Gd) ions, manganese (Mn) ions, cobalt (Co) ions, iron (Fe) ions, or a combination thereof,
- wherein the zinc ions and the other metal ions have a weight ratio of 1:0.05 to 1:1.25.
A wire bonding capillary, comprising:
- a ceramic material, consisting of:
- zirconia toughened alumina (ZTA), which is doped with zinc ions and other metal ions, wherein the other metal ions are chromium (Cr) ions, titanium (Ti) ions, gadolinium (Gd) ions, manganese (Mn) ions, cobalt (Co) ions, iron (Fe) ions, or a combination thereof,
- wherein the zinc ions and the other metal ions have a weight ratio of 1:0.06 to 1:0.9.
Dependencies are inferred from the claim text.