Switching device and resistance variable device
AssigneeKioxia Corporation
InventorsHiroshi Takehira, Katsuyoshi Komatsu, Tadaomi Daibou, Hiroki Kawai, Yuichi Ito
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AssigneeKioxia Corporation
InventorsHiroshi Takehira, Katsuyoshi Komatsu, Tadaomi Daibou, Hiroki Kawai, Yuichi Ito
Estimating the term…
A switching device according to an embodiment includes a switching layer disposed between a first electrode and a second electrode. The switching layer contains a material containing a first cation element Z, Te, and N. This material contains at least 5 atomic % or more of each of Z, Te, and N, and when an atomic ratio of Te is X, an atomic ratio of N is Y, an atomic ratio of Z is W, a ratio of Z2Te3 to ZN on a straight line connecting a compound of the first cation element Z with tellurium and nitride of the first cation element Z in a ternary phase diagram of Z, Te, and N is A, and a change in an N content from the Z2Te3—ZN line is B, the material has a composition satisfying X=1.2 (1−A) (0.5+B), Y=A (0.5+B), and W=1−X−Y, where −0.06≤B≤0.06 is satisfied when ⅓>A and ¾<A, and −0.06≤B and Y≤0.45 are satisfied when ⅓≤A≤¾.
A switching device, comprising:
Dependencies are inferred from the claim text.