Ceramic susceptor
AssigneeMiCo Ceramics Ltd.
InventorsHankyun Yoo, Junghyun Park, Junsung Lee
Life of this patent
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Abstract
The present disclosure relates to a ceramic susceptor. The ceramic susceptor of the present disclosure may include a ceramic plate having a heating element disposed thereon and at least one hole. The heating element may include a plurality of concentric circular patterns, each of the concentric circular patterns may include arc portions extending in a circumferential direction and a transverse portion interconnecting the arc portions, and among the arc portions of the plurality of concentric circular patterns, each of the arc portions, which face each other across the hole, may include, in a portion thereof, a protrusion protruding toward the hole.
Claims8
A ceramic susceptor comprising a ceramic plate having a heating element disposed thereon and at least one hole,
- wherein the heating element comprises a plurality of concentric circular patterns,
- each of the plurality of the concentric circular patterns comprises arc portions extending in a circumferential direction and a transverse portion interconnecting the arc portions,
- the plurality of concentric circular patterns comprise a first arc portion and a second arc portion facing each other with the at least one hole interposed therebetween, the first arc portion comprises a first protrusion protruding toward the at least one hole, and the second arc portion comprises a second protrusion protruding toward the at least one hole, and
- the first protrusion and the second protrusion are disposed on a line extending from the center of the ceramic plate toward the center of the at least one hole.
Dependencies are inferred from the claim text.