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US 11,962,973 B2Granted
Combined corrugated piezoelectric microphone and corrugated piezoelectric vibration sensor
AssigneeInfineon Technologies AG
InventorsChristian Bretthauer, David Tumpold, Pradyumna Mishra, Daniel Neumaier
Life of this patent
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Abstract
A combined MicroElectroMechanical structure (MEMS) includes a first piezoelectric membrane having one or more first electrodes, the first piezoelectric membrane being affixed between a first holder and a second holder; and a second piezoelectric membrane having an inertial mass and one or more second electrodes, the second piezoelectric membrane being affixed between the second holder and a third holder.
Claims21
A combined MEMS structure comprising:
- a substrate including a sound port configured to receive acoustic signals;
- a first piezoelectric membrane configured to receive the acoustic signals from the sound port and comprising one or more first electrodes, the first piezoelectric membrane being affixed between a first holder and a second holder;
- a second piezoelectric membrane comprising an inertial mass and one or more second electrodes, the second piezoelectric membrane being affixed between the second holder and a third holder;
- a plurality of additional piezoelectric membranes configured to provide additional inertial sensor signal outputs;
- a housing secured to the substrate and enclosing the first piezoelectric membrane and the second piezoelectric membrane;
- an integrated circuit positioned within the housing and configured to isolate the second piezoelectric membrane from the acoustic signals received through the sound port;
- and
- a selector circuit coupled to the first piezoelectric membrane, the second piezoelectric membrane, and the plurality of additional piezoelectric membranes, the selector circuit configured to selectively output signals received from the first piezoelectric membrane, the second piezoelectric membrane, and the plurality of additional piezoelectric membranes.
5 more elements
A packaged MEMS structure comprising:
- a substrate comprising a sound port and a contact pad;
- a first piezoelectric membrane comprising one or more first electrodes, the first piezoelectric membrane being affixed between a first holder and a second holder;
- a second piezoelectric membrane comprising an inertial mass and one or more second electrodes, the second piezoelectric membrane being affixed between the second holder and a third holder, wherein the first, second, and third holders are secured to the substrate;
- a plurality of additional piezoelectric membranes configured to provide inertial sensor signal outputs;
- an amplifier having first and second inputs coupled to the one or more first electrodes and the one or more second electrodes and an output coupled to the contact pad;
- and
- a selector circuit coupled to the first piezoelectric membrane, the second piezoelectric membrane, and the plurality of additional piezoelectric membranes, the selector circuit configured to selectively output signals received from the first piezoelectric membrane, the second piezoelectric membrane, and the plurality of additional piezoelectric membranes;
- and
- a housing secured to the substrate, enclosing the first piezoelectric membrane, the second piezoelectric membrane, the plurality of additional piezoelectric membranes, and the amplifier, the amplifier positioned in the housing to shield the second piezoelectric membrane from acoustic signals input to the housing through the sound port.
6 more elements
Dependencies are inferred from the claim text.