Composite substrate
AssigneeKYOCERA Corporation
InventorKoji Hamazono
Life of this patent
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Abstract
A composite substrate is a plate-shaped body where a first substrate and a second substrate overlap. The composite substrate includes a hole in the first substrate and the second substrate in a thickness direction of the plate-shaped body. A ratio A/B of an average thickness A of the first substrate to an average thickness B of the second substrate is ⅕ or less. An interface between the first substrate and the second substrate on an inner wall of the plate-shaped body that is positioned at the hole includes a part that is covered by a covering layer that contains a component that composes the second substrate.
Claims13
A composite substrate comprising:
- a plate-shaped body including a first substrate and a second substrate, wherein the first substrate and the second substrate overlap;
- a hole in the first substrate and the second substrate in a thickness direction of the plateshaped body;
- wherein a ratio A/B of an average thickness A of the first substrate to an average thickness B of the second substrate is ⅕ or less;
- wherein an interface between the first substrate and the second substrate on an inner wall of the plate-shaped body that is positioned at the hole includes a part that is covered by a covering layer that contains a component that composes the second substrate;
- and
- wherein a surface roughness of an inner wall of the first substrate is greater than a surface roughness of an inner wall of the second substrate.
A composite substrate comprising:
- a plate-shaped body including a first substrate made of a first material, the first substrate having a first surface and a second surface;
- a second substrate made of a second material, the second substrate having a first surface and a second surface, where the first substrate and the second substrate overlap and the second surface of the first substrate faces the first surface of the second substrate;
- a hole extending in a thickness direction through the plate-shaped body from a first opening in the first surface of the first substrate to a second opening in the second surface of the second substrate;
- wherein a ratio A/B of an average thickness A of the first substrate to an average thickness B of the second substrate is ⅕ or less;
- an interface between the second surface of the first substrate and the first surface of the second substrate positioned in the hole, the hole having a uniform diameter at the interface;
- a covering layer positioned to cover the interface in the hole;
- wherein the covering layer is made of the second material.
Dependencies are inferred from the claim text.