Semiconductor light-emitting element and method of manufacturing semiconductor light-emitting element

A method of manufacturing a semiconductor light-emitting element, the method comprising:

• forming an active layer composed of an AlGaN-based semiconductor material, on an n-type semiconductor layer composed of an n-type AlGaN-based semiconductor material;
• forming a p-type semiconductor layer on the active layer;
• partially removing the p-type semiconductor layer and the active layer so that an upper surface of a partial region of the n-type semiconductor layer is exposed;
• forming a p-side contact electrode in contact with an upper surface of the p-type semiconductor layer;
• forming a p-side current diffusion layer on the p-side contact electrode;
• forming an n-side contact electrode in contact with the exposed upper surface of the n-type semiconductor layer;
• forming a first current diffusion layer on the n-side contact electrode;
• forming a second current diffusion layer on the first current diffusion layer;
• forming a p-side pad electrode on the p-side current diffusion layer;
• and
• forming an n-side pad electrode on the second current diffusion layer, difference between a height level of an upper surface of the p-side contact electrode and a height level of an upper surface of the first current diffusion layer being 100 nm or smaller, and
• difference between a height level of an upper surface of the p-side current diffusion layer and a height level of an upper surface of the second current diffusion layer being 100 nm or smaller.