Semiconductor device and method of fabricating the same
AssigneeUnited Microelectronics Corp.
InventorPo-Yu Yang
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AssigneeUnited Microelectronics Corp.
InventorPo-Yu Yang
Estimating the term…
A semiconductor device includes a substrate, a semiconductor channel layer, a semiconductor barrier layer, a gate electrode, a first electrode, and a dielectric layer. The semiconductor channel layer is disposed on the substrate, and the semiconductor barrier layer is disposed on the semiconductor channel layer. The gate electrode is disposed on the semiconductor barrier layer. The first electrode is disposed at one side of the gate electrode. The first electrode includes a body portion and a vertical extension portion. The body portion is electrically connected to the semiconductor barrier layer, and the bottom surface of the vertical extension portion is lower than the top surface of the semiconductor channel layer. The dielectric layer is disposed between the vertical extension portion and the semiconductor channel layer.
A method for fabricating a semiconductor device, comprising:
Dependencies are inferred from the claim text.