Semiconductor device, method of manufacturing a semiconductor device, solid-state imaging device, and electronic apparatus
AssigneeSony Group Corporation
InventorsHideaki Togashi, Kosuke Nakanishi
Life of this patent
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Abstract
A semiconductor device of the present disclosure includes: a semiconductor element disposed on a first surface side of a semiconductor substrate; a through-electrode that is provided through the semiconductor substrate in a thickness direction of the semiconductor substrate and introduces charge obtained in the semiconductor element to a second surface side of the semiconductor substrate; and an amplifier transistor that outputs an electrical signal based on the charge introduced by the through-electrode, the amplifier transistor using the through-electrode as a gate electrode and including a source region and a drain region around the through-electrode.
Claims16
A semiconductor device, comprising:
- a semiconductor element disposed on a back surface side of a semiconductor substrate, wherein the semiconductor element comprises a photoelectric conversion film sandwiched between two transparent electrodes, and wherein an insulating film is between the semiconductor element and the semiconductor substrate;
- a through-electrode that is provided through the semiconductor substrate in a depth direction of the semiconductor substrate and introduces charge obtained in the semiconductor element to a front surface side of the semiconductor substrate, wherein the through-electrode is composed of a conductor that penetrates the semiconductor substrate and a separation layer that electrically separates the conductor and the semiconductor substrate;
- and
- an amplifier transistor disposed on the front surface side of the semiconductor substrate that outputs an electrical signal based on the charge introduced by the through- electrode, the amplifier transistor using the through-electrode as a gate electrode and including a source region and a drain region around the through-electrode, wherein the gate electrode of the amplifier transistor is electrically connected to the semiconductor element via a wire.
Dependencies are inferred from the claim text.