Manufacture method of array substrate, array substrate, and display panel

An array substrate, manufactured by a method comprising:

• sequentially forming a gate, a gate insulating layer, an active layer, an ohmic contact layer and a metal layer on a substrate, forming a photoetching mask on a metal layer, wherein a thickness of the photoetching mask in a half exposure area of the mask plate is from 2000 Å to 6000 Å;
• etching the metal layer, the ohmic contact layer and the active layer outside a covering area of the photoetching mask;
• ashing the photoetching mask for a preset time with an ashing reactant, wherein the ashing reactant comprises oxygen and sulfur hexafluoride, the preset time is from 70 seconds to 100 seconds, and a gas volume ratio between a first preset amount of sulfur hexafluoride and a second preset amount of oxygen is from 1:1 to 3:1;
• and
• sequentially etching the metal layer, the ohmic contact layer and the active layer based on the ashed photoetching mask, and forming a channel region of the array substrate.

A display panel, comprising an array substrate which is manufactured by operations comprising:

• sequentially forming a gate, a gate insulating layer, an active layer, an ohmic contact layer and a metal layer on a substrate, forming a photoetching mask on the metal layer, wherein thickness of the photoetching mask in a half exposure area of the mask plate is from 2000 Å to 6000 Å;
• etching the metal layer, the ohmic contact layer and the active layer outside a covering area of the photoetching mask;
• ashing the photoetching mask for a preset time with an ashing reactant, wherein the ashing reactant comprises oxygen and sulfur hexafluoride, the preset time is from 70 seconds to 100 seconds, and a gas volume ratio between a first preset amount of sulfur hexafluoride and a second preset amount of oxygen is from 1:1 to 3:1;
• and
• sequentially etching the metal layer, the ohmic contact layer and the active layer based on the ashed photoetching mask, and forming a channel region of the array substrate.