Laser apparatus and manufacturing method of display apparatus using the same
AssigneeSamsung Display Co., Ltd.
InventorsDong-min Lee, Ji-Hwan Kim, Jongoh Seo, Byung Soo So, Dong-Sung Lee, Jonghoon Choi
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Abstract
A laser apparatus includes a laser generator configured to generate a first laser beam proceeding along a first direction, and an inversion module configured to convert the first laser beam to a second laser beam proceeding along the first direction, the inversion module including a splitter configured to form a reflected laser beam by partially reflecting the first laser beam, and a transmitted laser beam by partially transmitting the first laser beam, and a prism configured to reflect the reflected laser beam.
Claims8
A manufacturing method of a display apparatus, the method comprising:
- forming an amorphous silicon thin film on a substrate;
- crystallizing the amorphous silicon thin film into a polycrystalline silicon thin film by irradiating a laser beam onto the amorphous silicon thin film using a laser apparatus;
- and
- forming an insulating layer,
- wherein the laser apparatus comprises:
- a laser generator configured to generate a first laser beam proceeding along a first direction from the laser generator to a target;
- and
- an inversion module configured to convert the first laser beam to a second laser beam proceeding along the first direction toward the target, the inversion module comprising:
- a splitter between the laser generator and the target in the first direction, configured to form a reflected laser beam by partially reflecting the first laser beam, and configured to form a transmitted laser beam by partially transmitting the first laser beam;
- and
- a prism configured to reflect the reflected laser beam.
A manufacturing method of a display apparatus, the method comprising:
- forming an amorphous silicon thin film on a substrate;
- crystallizing the amorphous silicon thin film into a polycrystalline silicon thin film by irradiating a laser beam onto the amorphous silicon thin film using a laser apparatus;
- and
- forming an insulating layer,
- wherein the laser apparatus comprises:
- a laser generator configured to generate a first laser beam proceeding along a first direction;
- an inversion module configured to convert the first laser beam to a second laser beam proceeding along the first direction, the inversion module comprising:
- a splitter configured to form a reflected laser beam by partially reflecting the first laser beam, and a transmitted laser beam by partially transmitting the first laser beam;
- and
- a prism configured to reflect the reflected laser beam,
- a first path converter that is configured to receive the second laser beam emitted from the inversion module, and to emit a third laser beam traveling in a third direction that is perpendicular to the first direction;
- and
- a second path converter that is configured to receive the third laser beam, and to emit a fourth laser beam traveling in a direction that is opposite to the first direction.
Dependencies are inferred from the claim text.