Apparatus and method for forming a package structure

An apparatus for forming a package structure, comprising:

• a processing chamber for bonding a first package component and a second package component;
• a bonding head disposed in the processing chamber, wherein the bonding head comprises a first vacuum tube and a second vacuum tube, the first vacuum tube communicates with a first vacuum device, the second vacuum tube communicates with a second vacuum device, and the first vacuum device and the second vacuum device operate independently;
• a nozzle connected to the bonding head and configured to hold the second package component, wherein the nozzle comprises a plurality of first holes overlapping the first vacuum tube and the second vacuum tube and a plurality of second holes communicating with the first holes via a plurality of trenches, and a top surface of the trenches is substantially level with a top surface of the nozzle;
• and
• a chuck table disposed in the processing chamber and configured to hold and heat the first package component.

An apparatus for forming a package structure, comprising:

• a processing chamber for bonding a first package component and a second package component;
• a chuck table for receiving the first package component and holding the first package component in the processing chamber, wherein the chuck table comprises a plurality of pins movable over a top surface of the chuck table;
• a carrier for transferring the first package component to the chuck table, wherein the pins move away from the top surface of the chuck table for receiving the first package component from the carrier;
• a bonding head disposed in the processing chamber, wherein the bonding head comprises a plurality of vacuum tubes communicating with a plurality of vacuum devices;
• and
• a nozzle connected to the bonding head and configured to hold the second package component and align the second package component with the first package component over the chuck table, wherein the nozzle comprises:
• a plurality of first holes overlapping the vacuum tubes;
• a first plurality of second holes communicating with one of the first holes via a first plurality of trenches;
• and
• a second plurality of second holes communicating with another of the first holes via a second plurality of trenches, wherein the first plurality of second holes and the second plurality of second holes overlap opposite edges of the second package component.