Power-tap pass-through to connect a buried power rail to front-side power distribution network
AssigneeTokyo Electron Limited
InventorsLars Liebmann, Jeffrey Smith, Daniel Chanemougame, Paul Gutwin
Life of this patent
Estimating the term…
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AssigneeTokyo Electron Limited
InventorsLars Liebmann, Jeffrey Smith, Daniel Chanemougame, Paul Gutwin
Estimating the term…
A semiconductor device includes a device plane including an array of cells each including a transistor device. The device plane is formed on a working surface of a substrate and has a front side and a backside opposite the front side. A signal wiring structure is formed on the front side of the device plane. A front-side power distribution network (FSPDN) is positioned on the front side of the device plane. A buried power rail (BPR) is disposed below the device plane on the backside of the device plane. A power tap structure is formed in the device plane. The power tap structure electrically connects the BPR to the FSPDN and electrically connects the BPR to at least one of the transistor devices to provide power to the at least one of the transistor devices.
A semiconductor device, comprising:
A method of microfabrication, comprising:
Dependencies are inferred from the claim text.