Semiconductor device including through-electrodes

A semiconductor device comprising:

• a semiconductor substrate having a first side and a second side opposing each other;
• an active region and an isolation region on the first side of the semiconductor substrate;
• a circuit device disposed on the active region, on the first side of the semiconductor substrate;
• a front side interconnection structure on the first side of the semiconductor substrate, the front side interconnection structure including a plurality of front side interconnection layers electrically connected to the circuit device and disposed on different levels from each other, and front side vias electrically connecting the plurality of front side interconnection layers to each other;
• a first back side interconnection structure and a second back side interconnection structure, the first and second back side interconnection structures are disposed below the second side of the semiconductor substrate;
• a buried structure having at least a portion thereof disposed in the isolation region, the buried structure including a conductive line;
• a first through-electrode structure including a first through-electrode directly contacting the conductive line and extending downwardly to penetrate through the semiconductor substrate between the conductive line and the first back side interconnection structure, and a first insulating spacer on lateral side surfaces of the first through-electrode;
• and
• a second through-electrode structure including a second through-electrode penetrating through the semiconductor substrate between a first front side interconnection layer of the plurality of the front side interconnection layers and the second back side interconnection structure, the second through-electrode directly contacting the first front side interconnection layer, the second through-electrode structure including a second insulating spacer on lateral side surfaces of the second through-electrode,
• wherein the first front side interconnection layer is disposed on a level higher than a level of the conductive line in relation to the second side of the semiconductor substrate.