Semiconductor device and method for manufacturing same
AssigneeChangxin Memory Technologies, Inc.
InventorsChen Huang, Meng-Feng Tsai
Life of this patent
Estimating the term…
Abstract
A semiconductor device includes a semiconductor substrate. The semiconductor substrate includes multiple chip regions and a strip line for separating the chip regions. A test key is formed in the strip line and is used for a bit line contact (BLC) resistance test. The test key includes active regions and connecting structures. The active regions are formed in the semiconductor substrate. The connecting structures are located at ends of the active regions. The multiple active regions located on the same column are sequentially connected end to end by the connecting structures.
Claims13
A semiconductor device, comprising:
- a semiconductor substrate, comprising a plurality of chip regions and strip lines for separating the chip regions,
- wherein test keys are formed in the strip lines, among which each of the test keys comprises:
- a plurality of active regions, disposed in the semiconductor substrate, staggered and arranged in parallel, wherein an extending direction of the plurality of active regions has an included angle in the range of 60°-80° with a row direction;
- and
- a plurality of connecting structures, disposed at ends of the plurality of active regions, the plurality of active regions aligned on a same column being sequentially connected end to end by the plurality of connecting structures, one of the plurality of active regions and corresponding connecting structures disposed at a head end and a tail end of the one of the plurality of active regions jointly constitute a “Z”-shaped test key in a column direction.
A method for manufacturing a semiconductor device, comprising steps of:
- providing a semiconductor substrate;
- forming a plurality of chip regions and strip lines for separating the chip regions on the semiconductor substrate, wherein a plurality of active regions formed synchronously with the chip regions being provided in the strip lines, a plurality of active regions staggered and arranged in parallel, wherein an extending direction of the plurality of active regions has an included angle in the range of 60°-80° with a row direction;
- and
- forming a plurality of connecting structures located at ends of the active regions, by which a plurality of active regions on a same column are sequentially connected end to end, one of the plurality of active regions and corresponding connecting structures disposed at a head end and a tail end of the one of the plurality of active regions jointly constitute a “Z”-shaped test key in a column direction.
Dependencies are inferred from the claim text.