Vented susceptor
AssigneeASM IP Holding B.V.
InventorsUday Kiran Rokkam, Sam Kim, Saket Rathi, Dakai Bian
Life of this patent
Estimating the term…
Abstract
A susceptor can include a generally circular shape and may include an inner and outer susceptor. The outer susceptor can include a support region having one or more support mechanisms as well as a channel region extending from the region boundary to an outer radial boundary radially inward of an outer edge of the susceptor, the channel region can include a plurality of channels extending radially from the region boundary to the outer radial boundary. The inner susceptor can include a second plurality of channels extending from the inner radial boundary to an edge of the inner susceptor.
Claims14
A susceptor comprising:
- a face configured to support a substrate thereon;
- an outer edge forming an outer perimeter around the face;
- a back surface opposite the face, wherein the face comprises:
- a channel region positioned between the outer edge and a center of the face;
- and
- a plurality of channels disposed within the channel region and extending radially relative to the center of the face;
- and
- one or more apertures extending between the face and the back surface, the one or more apertures configured to allow for pins to extend therethrough and lift a substrate from the face of the susceptor, the one or more apertures disposed within the channel region,
- wherein each of the plurality of channels is substantially straight in a radial direction,
- wherein an angular separation between first and second channels of the plurality of channels is greater than an angular separation between the second channel and a third channel of the plurality of channels, and
- wherein the first channel is radially consecutive with the second channel and the second channel is radially consecutive with the third channel.
A susceptor comprising:
- a face configured to support a substrate thereon;
- an outer edge forming an outer perimeter around the face;
- a back surface opposite the face, wherein the face comprises:
- a channel region positioned between the outer edge and a center of the face;
- and
- a plurality of channels disposed within the channel region and extending radially relative to the center of the face between an inner radial boundary and an outer radial boundary of the channel region, each of the plurality of channels extending from the inner radial boundary to the outer radial boundary;
- and
- a radially extending substantially flat and smooth rim region between the outer edge and the outer radial boundary of the channel region,
- wherein an angular separation between first and second channels of the plurality of channels is greater than an angular separation between the second channel and a third channel of the plurality of channels, and
- wherein the first channel is radially consecutive with the second channel and the second channel is radially consecutive with the third channel.
Dependencies are inferred from the claim text.