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US 11,961,745 B2Granted
Wet bench structure
AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsChung-Yu Lin, Shih-Chi Kuo, Chun-Chieh Mo
Life of this patent
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Abstract
The present disclosure describes an apparatus for processing one or more objects. The apparatus includes a carrier configured to hold the one or more objects, a tank filled with a processing agent and configured to receive the carrier, and a spinning portion configured to contact the one or more objects and to spin the one or more objects to disturb a flow field of the processing agent.
Claims20
An apparatus, comprising:
- a carrier configured to hold a plurality of objects, wherein the carrier comprises a handle and one or more lifting portions;
- a tank configured to receive the carrier, wherein the tank holds a processing agent;
- a first roller configured to rotate a first sub-roller in contact with a first object of the plurality of objects and configured to spin the first object at a first speed;
- a second roller configured to rotate a second sub-roller in contact with a second object of the plurality of objects and configured to simultaneously spin the second object at a second speed different from the first speed, wherein:
- the first roller is attached to a first sidewall of the tank and the second roller is attached to a second sidewall of the tank, and
- the first sub-roller and the second sub-roller are detached from each other;
- and
- a control device programmed to simultaneously rotate the first object at the first speed and the second object at the second speed.
5 more elements
An apparatus, comprising:
- a carrier configured to hold a plurality of objects, wherein the carrier comprises a handle and one or more lifting portions;
- a tank configured to hold a processing agent and to receive the carrier, wherein a top portion of the handle is configured to be above a top level of the processing agent;
- a first roller attached to a first sidewall of the tank and configured to spin the plurality of objects based on a control signal, wherein the first roller is configured to rotate a first sub-roller in contact with a first object of the plurality of objects
- a second roller attached to a second sidewall of the tank and configured to spin a second object of the plurality of objects based on the control signal, wherein the second roller is configured to rotate a second sub-roller in contact with the second object of the plurality of objects;
- and
- a computing device programmed to generate the control signal for simultaneously rotating the first roller and the second roller, wherein the control signal comprises a first spin speed and a first spin direction for the first object of the plurality of objects and a second spin speed and a second spin direction for the second object of the plurality of objects, and wherein the first spin speed is different from the second spin speed.
3 more elements
A system, comprising:
- a carrier configured to hold a plurality of objects;
- a wet bench tank comprising a processing agent, wherein the processing agent covers a surface of the plurality of objects;
- a first roller attached to a first sidewall of the wet bench tank and configured to rotate a first sub-roller, wherein the first sub-roller is configured to rotate a first object of the plurality of objects at a first speed;
- a second roller attached to a second sidewall of the wet bench tank and configured to rotate a second sub-roller, wherein the second sub-roller is configured to rotate a second object of the plurality of objects at a second speed;
- and
- a control device programmed to simultaneously rotate the first object of the plurality of objects at the first speed and the second object of the plurality of objects at the second speed, wherein the first speed is different from the second speed.
3 more elements
Dependencies are inferred from the claim text.