Shielding device and thin-film-deposition equipment with the same

A thin-film-deposition equipment, comprising:

• a reaction chamber comprising a containing space;
• a carrier disposed within the containing space for carrying at least one substrate;
• and
• a shielding device comprising:
• a first-shield member that is disposed within the containing space,
• a second-shield member that is disposed within the containing space,
• a driver that interconnects the first-shield member and the second-shield member for respectively driving and swinging the first-shield member and the second-shield member to move in opposite directions and between an open state and a shielding state, wherein in the shielding state, the first-shield member and the second-shield member approach each other and be adjacent to each other for covering the carrier, wherein:
• the first-shield member of the shielding device comprises a first-inner surface formed with at least one protrusion;
• the second-shield member of the shielding device comprises a second-inner surface formed with at least one cavity;
• the at least one protrusion on the first-inner surface corresponds to the at least one cavity on the second-inner surface;
• and in the shielding state, the first-inner surface of the first-shield member and the second-inner surface of the second-shield member are adjacent to each other, the at least one protrusion on the first-inner surface enters the at least one cavity on the second-inner surface, the first-shield member and the second-shield member together cover the carrier.

A shielding device adapted to a thin-film-deposition equipment, comprising:

• a first-shield member;
• a second-shield member;
• and
• a driver interconnecting the first-shield member and the second-shield member for respectively driving and swinging the first-shield member and the second-shield member to move in opposite directions between an open state and a shielding state, wherein in the shielding state, the first-shield member and the second-shield member are adjacent to each other, and wherein in the open state, the first-shield member and the second-shield member have an open space therebetween, wherein the driver comprises a shaft seal and at least one motor;
• and the at least one motor is connected to the first-shield member and the second-shield member via the shaft seal.