Fabrication of in situ HR-LCTEM nanofluidic cell for nanobubble interactions during EOR processes in carbonate rocks
AssigneeSaudi Arabian Oil Company
InventorsHassan Alqahtani, Dong Kyu Cha, Mohammed Al Otaibi
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Abstract
Systems and methods for preparing a nanofluidic LCTEM cell are provided. An exemplary method includes coating a photoresist layer onto a top surface of a silicon nitride substrate; etching channels into the photoresist layer; depositing calcite into the etched channels; removing the photoresist; placing the cell on a holder; connecting a first end of an inlet line to the cell; connecting a second end of the inlet line to an ultrasound transducer configured to generate nanobubbles; and connecting an outlet line to the cell.
Claims23
A method of preparing a nanofluidic LCTEM cell, comprising:
- coating a photoresist layer onto a top surface of a silicon nitride substrate;
- etching channels into the photoresist layer;
- depositing calcite into the etched channels;
- removing the photoresist;
- placing the cell on a holder;
- connecting a first end of an inlet line to the cell;
- connecting a second end of the inlet line to an ultrasound transducer configured to generate nanobubbles;
- and
- connecting an outlet line to the cell.
A nanofluidic LCTEM cell, comprising:
- a silicon nitride substrate;
- calcite channels on the top of the substrate;
- a first end of an inlet line connected to the cell;
- a second end of the inlet line connected to an ultrasound transducer configured to generate nanobubbles;
- and
- an outlet line connected to the cell.
Dependencies are inferred from the claim text.