Charged particle beam device and operation method therefor

A charged particle beam device comprising:

• an optical system configured to irradiate a sample with a plurality of primary charged particle beams;
• an optical parameter setting unit configured to set a parameter of the optical system;
• a detector configured to individually detect a plurality of secondary charged particle beams emitted from the sample;
• a plurality of storage units each configured to store a signal, that is detected by the detector and converted into a digital pixel, in a form of a detected image;
• an evaluation value derivation unit configured to derive an evaluation value of the primary charged particle beam from the detected image;
• a GUI configured to receive an input from a user;
• an image reduction unit configured to reduce the detected image;
• a display image memory configured to store the image reduced by the image reduction unit;
• a display control unit configured to display, on a screen of the GUI, the image stored in the display image memory and the evaluation result based on the evaluation value;
• a scan control unit configured to generate a scan signal of the primary charged Particle beam;
• and
• a controller configured to control write and read of an image of the storage unit, wherein
• the controller includes a scan pixel counter configured to count the digital pixel and a transmission pixel counter configured to count the number of transmission pixels during image transmission,
• performs a write control so as to switch the storage unit configured to store the image when scanning completion is determined based on the number of scan pixels output from the scan pixel counter and a preset image size, and
• performs a read control so as to switch the storage unit configured to read the image when transmission completion is determined based on the number of transmission pixels output from the transmission pixel counter and a preset image size.

An operation method for a charged particle beam device, the charged particle beam device including a GUI configured to display an image and receive an input from a user, the operation method comprising:

• setting a parameter for an optical system configured to irradiate a sample with a plurality of primary charged particle beams;
• individually detecting a plurality of secondary charged particle beams emitted from the sample;
• converting a detected signal into a digital pixel and storing the digital pixel as an image;
• deriving an evaluation value of the primary charged particle beam from the image;
• and
• reducing a plurality of the detected images and simultaneously displaying, on a screen of the GUI, the reduced images and evaluation results based on the evaluation values adjacently.