Systems and methods for image enhancement for a multi-beam charged-particle inspection system

A system for multi-beam scanning, comprising:

• a detector including circuitry for detecting signal information representative of first and second images, wherein the first image is associated with a first beam of a set of beams and the second image is associated with a second beam of the set of beams;
• a controller with at least one processor and a non-transitory computer readable medium comprising instructions that, when executed by the processor, cause the controller to:
• perform a frequency analysis of the signal information;
• detect, based on the frequency analysis, disturbances in positioning of the first and second beams in relation to a sample;
• obtain an image of the sample using the signal information of the first and second beams;
• and
• correct the image of the sample using the identified disturbances.