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US 11,961,696 B1Granted
Ion source cathode
AssigneeIon Technology Solutions, LLC
InventorsManuel A. Jerez, Carlos F. M. Borges, William A. Natoli
Life of this patent
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Abstract
The improved cathode sub-assembly includes a solid cylindrical cathode of tungsten, a cylindrical holder concentric to the cathode with an internal radially directed rib receiving one end of the cathode, and a cylindrical reflector threadably mounted within the holder in circumferentially spaced relation to the cathode. The holder is threadably mounted in a support plate to be able to be readily removed for servicing and/or replacement.
Claims13
A cathode assembly for an ion implanter comprising
- a cylindrical cathode,
- a cylindrical holder concentric to said cathode, said holder having an internal radially directed rib receiving one end of said cathode in slidable relation;
- and
- a cylindrical reflector threadably mounted within said holder in circumferentially spaced relation to said cathode.
1 more element
A combination comprising
- a support plate;
- a cylindrical holder threadably mounted in and projecting from said support plate, said holder having an internal radially directed rib;
- a cylindrical cathode having one end slidably received in said rib of said holder;
- and
- a cylindrical reflector threadably mounted within said holder in circumferentially spaced relation to said cathode.
2 more elements
An ion source for generating an ion beam comprising
- an arc discharge chamber of box-like shape having a pair of opposed walls, one of said walls having an opening therein;
- a cover disposed on said chamber and having a slit for passage of an ion beam therethrough;
- a cylindrical graphite liner disposed in said opening of said one wall of said chamber, said liner having a circumferential shoulder at one end in contact with said wall of said chamber and a cylindrical surface in circumferentially spaced relation to said wall to define a gap therebetween;
- and
- a cathode assembly disposed within said liner for emitting electrons therefrom into said chamber.
2 more elements
Dependencies are inferred from the claim text.