Mask inspection apparatus and mask inspection method using the same
AssigneesSamsung Display Co., Ltd., Hims Co., Ltd.
InventorsSangdon Hwang, BongSuk Kim, TaeHyun Kim, Mihye Kwon, Ilha Song, Jimin Woo
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Abstract
A mask inspection method including the steps of obtaining an image of a mask including a first region having a plurality of first openings, and a second region having a plurality of second openings, sectioning the image into a first partial image corresponding to the first region and a second partial image corresponding to the second region, respectively, inspecting the first region of the mask based on the first partial image, and inspecting the second region of the mask based on the second partial image.
Claims20
A mask inspection method in a mask inspection apparatus comprising a camera, comprising the steps of:
- obtaining, with the camera, an image of a mask including a first region having a plurality of first openings and a second region having a plurality of second openings;
- sectioning, with a sectioning part receiving the image from the camera, the image into a first partial image corresponding to the first region and a second partial image corresponding to the second region, respectively;
- inspecting, with a first inspection part, the first region of the mask based on the first partial image;
- and
- inspecting, with a second inspection part, the second region of the mask based on the second partial image.
A mask inspection apparatus, comprising:
- a camera to obtain an image of a mask including a first region having a plurality of first openings and a second region having a plurality of second openings;
- a sectioning part to section the image into a first partial image corresponding to the first region and a second partial image corresponding to the second region, respectively;
- a first inspection part to inspect the first region of the mask based on the first partial image;
- and
- a second inspection part to inspect the second region of the mask, based on the second partial image.
Dependencies are inferred from the claim text.