Diagnostic tool to tool matching methods for manufacturing equipment
AssigneeApplied Materials, Inc.
InventorsSejune Cheon, Jeong Jin Hong, Mikyung Shim, Xiaoqun Zou, Jinkyeong Lee, Sang Hong Kim
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Abstract
A method includes receiving trace sensor data associated with a first manufacturing process of a manufacturing chamber. The method further includes processing the trace sensor data by a processing device to generate summary data associated with the trace sensor data. The method further includes generating a quality index score based on the summary data. The method further includes providing an alert to a user based on the quality index score. The alert includes an indication that the manufacturing chamber performance does not meet a first threshold.
Claims20
A method, comprising:
- receiving trace sensor data associated with a first manufacturing process of a manufacturing chamber;
- processing the trace sensor data by a processing device to generate summary data associated with the trace sensor data;
- generating a quality index score based on the summary data, wherein the quality index score is generated in view of:
- a plurality of weighting factors, wherein a weighting factor determines a significance of a contribution of data generated by a first sensor during a first process operation to the quality index score;
- and
- a plurality of control limits, wherein a control limit is a threshold used to classify a data point of the summary data;
- and
- performing a corrective action in view of the quality index score.
A system, comprising memory and a processing device coupled to the memory, wherein the processing device is configured to:
- receive trace sensor data associated with a first manufacturing process of a manufacturing chamber;
- process the trace sensor data to generate summary data associated with the trace sensor data, wherein generating the summary data comprises:
- identifying a steady state portion of the trace sensor data;
- identifying a transient portion of the trace sensor data;
- generating a first portion of the summary data based on the steady state portion by calculating statistical metric values from the steady state portion;
- and
- generating a second portion of the summary data based on the transient portion in view of one or more differences between the transient portion and predicted data associated with the transient portion;
- generate a quality index score based on the summary data;
- and
- perform a corrective action in view of the quality index score.
A non-transitory machine-readable storage medium storing instructions which, when executed, cause a processing device to perform operations comprising:
- receiving trace sensor data associated with a first manufacturing process of a manufacturing chamber;
- processing the trace sensor data to generate summary data associated with the trace sensor data, wherein generating the summary data comprises:
- identifying a steady state portion of the trace sensor data;
- identifying a transient portion of the trace sensor data;
- generating first summary data of the steady state portion by calculating statistical metric values from the steady state portion;
- and
- generating second summary data of the transient portion in view of one or more differences between the transient portion and data generated by a digital twin model of at least one component of the manufacturing chamber;
- generating a quality index score based on the summary data;
- and
- performing a corrective action in view of the quality index score.
Dependencies are inferred from the claim text.