Wafer searching method and device
AssigneePowerchip Semiconductor Manufacturing Corporation
InventorsJr-Rung Shiu, Ching-Ly Yueh, Pao-Ju Pao
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AssigneePowerchip Semiconductor Manufacturing Corporation
InventorsJr-Rung Shiu, Ching-Ly Yueh, Pao-Ju Pao
Estimating the term…
The disclosure provides a wafer searching method and device. The method includes: obtaining a target wafer and a reference wafer; determining a first specific area in the target wafer, and obtaining a first significant distribution feature of the first specific area; determining a second specific area in the reference wafer, and obtaining a second significant distribution feature of the second specific area; in response to determining that the first significant distribution feature corresponds to the second significant distribution feature, estimating a fail pattern similarity between the first specific area and the second specific area; in response to determining that the fail pattern similarity is greater than a threshold, providing the reference wafer as a search result corresponding to the target wafer.
A wafer searching method adapted for a wafer searching device, wherein the method comprises:
A wafer searching device, comprising:
Dependencies are inferred from the claim text.