Invariable magnification multilevel optical device with telecentric converter
AssigneeASML Holding N.V.
InventorsLev Ryzhikov, Yuli Vladimirsky
Life of this patent
Estimating the term…
Abstract
A pre-alignment system includes a common object lens group configured to collect diffracted beams from a patterning device, wherein the common object lens group is further configured to produce telecentricity in an object space of the pre-alignment system. The pre-alignment system also includes a multipath sensory array having at least one image lens system, wherein the at least one image lens system includes a telecentric converter lens configured to produce telecentricity in an image space of the pre-alignment system.
Claims16
A pre-alignment system with at least two channels, comprising:
- a common object lens group configured to collect diffracted beams from a patterning device, wherein the common object lens group is further configured to produce telecentricity in an object space of the pre-alignment system;
- a multipath sensory array comprising at least one image lens system, wherein the at least one image lens system comprises:
- a telecentric converter lens configured to produce telecentricity in an image space of the pre-alignment system;
- and
- a detector for each of the at least one image lens system, wherein the detector is configured to create a pre-alignment signal based on the diffracted beams.
A lithographic apparatus, comprising:
- an illumination system configured to condition a radiation beam;
- a support structure configured to support a patterning device;
- a substrate table configured to hold a substrate;
- a projection system configured to project a pattern imparted to the radiation beam by the patterning device onto a target portion of the substrate;
- and
- first and second positioners configured to position the patterning device and the substrate, respectively, wherein the first positioner comprises:
- a pre-alignment system with at least two channels, comprising:
- a common object lens group configured to collect diffracted beams from the patterning device, wherein the common object lens group is further configured to produce telecentricity in an object space of the pre-alignment system;
- a multipath sensory array comprising at least one image lens system, wherein the at least one image lens system comprises:
- a telecentric converter lens configured to produce telecentricity in an image space of the pre-alignment system;
- and
- a detector for each of the at least one image lens system, wherein the detector is configured to create a pre-alignment signal based on the diffracted beams.
Dependencies are inferred from the claim text.