Radiation filter for a radiation sensor
AssigneeASML Netherlands B. V.
InventorsVahid Mohammadi, Yassin Chowdhury, Pieter Cristiaan De Groot, Wouter Joep Engelen, Marcel Johannes Petrus Theodorus Van Der Hoorn
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Abstract
A radiation filter for reducing transmission of an unwanted wavelength of radiation. The radiation filter includes zirconium and SiN3. The radiation filter may form part of a radiation sensor including a passivation layer arranged to receive radiation transmitted by the radiation filter, a photodiode arranged to receive radiation transmitted by the passivation layer, and circuit elements connected to the photodiode. The radiation sensor may perform optical measurements as part of an extreme ultraviolet lithographic apparatus or a lithographic tool.
Claims20
A radiation sensor comprising:
- a radiation filter for reducing transmission of an unwanted wavelength of radiation, the radiation filter comprising zirconium and SiN3;
- a passivation layer arranged to receive radiation transmitted by the radiation filter;
- a photodiode arranged to receive radiation transmitted by the passivation layer;
- and
- circuit elements connected to the photodiode.
A method of manufacturing a radiation sensor, the method comprising:
- forming a photodiode on a substrate of the radiation sensor;
- forming circuit elements that are connected to the photodiode;
- forming a passivation layer on the substrate;
- and
- forming a radiation filter for reducing transmission of an unwanted wavelength of radiation, the radiation filter comprising zirconium and SiN3 wherein the passivation layer is arranged to receive radiation transmitted by the radiation filter and the photodiode is arranged to receive radiation transmitted by the passivation layer.
A radiation filter for reducing transmission of an unwanted wavelength of radiation, the radiation filter comprising a first layer comprising zirconium, a second layer comprising SiN3, and a third layer comprising silicon, wherein the third layer is provided on the first layer.
Dependencies are inferred from the claim text.