Substrate holder, lithographic apparatus, device manufacturing method, and method of manufacturing a substrate holder
AssigneeASML Netherlands B.V.
InventorsRaymond Wilhelmus Louis Lafarre, Sjoerd Nicolaas Lambertus Donders, Nicolaas Ten Kate, Nina Vladimirovna Dziomkina, Yogesh Pramod Karade, Elisabeth Corinne Rodenburg
Life of this patent
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Abstract
A substrate holder for a lithographic apparatus has a main body having a thin-film stack provided on a surface thereof. The thin-film stack forms an electronic or electric component such as an electrode, a sensor, a heater, a transistor or a logic device, and has a top isolation layer. A plurality of burls to support a substrate are formed on the thin-film stack or in apertures of the thin-film stack.
Claims20
A substrate holder for use in a lithographic apparatus, the substrate holder comprising:
- a main body having a first side of the main body and a second side of the main body opposite to the first side;
- a plurality of first burls at the first side of the main body and having end surfaces to support a substrate in the lithographic apparatus, wherein each of the first burls comprises a lower body portion protruding from the main body and an upper body portion above the lower body portion, wherein the lower body portions are a different material than the upper body portions, and wherein the upper body portions comprise a material selected from:
- diamond, diamond-like carbon, SiC, SiO2, TiN, cubic boron nitride, silicon nitride, titanium, titanium carbide, cordierite or aluminum nitride;
- and
- a plurality of second burls at the second side of the main body,
- wherein the main body is grounded.
A substrate holder for use in a lithographic apparatus, the substrate holder comprising:
- a main body having a first side of the main body and a second side of the main body opposite to the first side;
- a plurality of first burls at the first side of the main body and having end surfaces to support a substrate;
- a plurality of second burls at the second side of the main body;
- and
- a heater provided to the main body and configured to control a temperature of the substrate and/or the main body,
- wherein the main body is grounded.
A substrate holder for use in a lithographic apparatus, the substrate holder comprising:
- a main body having a first side of the main body and a second side of the main body opposite to the first side;
- a plurality of first burls at the first side of the main body and having end surfaces to support a substrate;
- and
- a plurality of second burls at the second side of the main body,
- wherein (1) the main body has a thickness in a range of 1 mm to 50 mm, (2) each of the first burls and/or second burls has a height in a range of about 5 μm to about 250 μm, and/or (3) a total area of all the burls on one side of the main body is less than 3% of the total surface area of the main body, and wherein the main body is grounded.
Dependencies are inferred from the claim text.