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US 11,960,211 B2Granted
Optical lithography system and method of using the same
AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsHung-Jui Kuo, Ting-Yang Yu, Ming-Tan Lee
Life of this patent
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Abstract
In an embodiment, an apparatus includes an energy source, a support platform for holding a wafer, an optical path extending from the energy source to the support platform, and a photomask aligned such that a patterned major surface of the photomask is parallel to the force of gravity, where the optical path passes through the photomask, where the patterned major surface of the photomask is perpendicular to a topmost surface of the support platform.
Claims14
A lithography system comprising:
- a radiation source;
- an optical system configured to receive radiation from the radiation source transmitted through a patterned mask and direct it to a surface of a semiconductor wafer, the optical system comprises a light pipe configured to direct the radiation through the patterned mask to the surface of the semiconductor wafer, the light pipe being between the radiation source and the patterned mask;
- and
- a mask system comprising:
- the patterned mask over the semiconductor wafer, a major patterned surface of the patterned mask having a first curvature, the first curvature having a first radius greater than zero;
- and
- a wafer chuck configured to curve and support the semiconductor wafer, the wafer chuck having a top surface with a curvature matching the first curvature, the top surface of the wafer chuck being configured to hold the semiconductor wafer to have the first curvature, wherein the top surface of the wafer chuck is in physical contact with a bottom surface of the semiconductor wafer.
4 more elements
A lithography system comprising:
- an energy source;
- a wafer chuck for holding a semiconductor wafer;
- a mask chuck configured to support a photomask over the semiconductor wafer, wherein the mask chuck is also configured to allow gravitational effects to cause the photomask to sag at a center of the photomask such that a major patterned surface of the photomask has a first curvature, the first curvature having a first radius greater than zero, the wafer chuck having a top surface with a curvature matching the first curvature, the top surface of the wafer chuck being configured to hold the semiconductor wafer to have the first curvature;
- and
- a light pipe used to direct energy from the energy source through the photomask to the wafer chuck, the light pipe being between the energy source and the photomask.
2 more elements
A lithography system comprising:
- a radiation source;
- an optical system configured to receive radiation from the radiation source transmitted through a patterned mask and direct it to a surface of a wafer, the optical system comprising a light pipe to direct the radiation through the patterned mask to the wafer, the light pipe being between the radiation source and the patterned mask;
- the patterned mask over the wafer, a major patterned surface of the patterned mask having a first curvature, the first curvature having a first radius greater than zero;
- and
- a wafer chuck having a top surface with a curvature matching the first curvature, the top surface of the wafer chuck being configured to hold the wafer to have the first curvature, wherein the top surface of the wafer chuck is in physical contact with a bottom surface of the wafer.
2 more elements
Dependencies are inferred from the claim text.