Method for capturing a relative alignment of a surface
AssigneeCarl Zeiss Microscopy GmbH
InventorsFrank Klemm, Thomas Egloff
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AssigneeCarl Zeiss Microscopy GmbH
InventorsFrank Klemm, Thomas Egloff
Estimating the term…
A method for capturing a relative alignment of a surface (2.1), extending substantially in one plane, of an object (2), in which a focus (f) of a light beam is guided along a scanning path (1). Components of the light beam that are reflected by the surface (2.1) are captured. The scanning path (1) extends substantially parallel to an x-y-plane that extends orthogonally to an optical axis (oA) of a detection objective (5). A relative position and alignment of the surface (2.1) are ascertained on the basis of the reflected components. A normal (N) of the surface (2.1) and the relative alignment thereof are virtually ascertained and/or the focus (F) is moved in the direction of the optical axis (oA) during the scanning of the scanning path (1, 1ax) such that an axial scan trajectory or an axial scanning path (1ax) are brought about.
Method for capturing a relative alignment of a surface of a coverslip extending substantially in one plane, in which a focus of a light beam is guided along a scanning path and components of the light beam that are reflected by said surface are captured by a laser scanning microscope, wherein said scanning path extends substantially parallel to an x-y-plane of said surface that extends orthogonally to an optical axis of a detection coverslip;
Dependencies are inferred from the claim text.