Meta-lens structure and method of fabricating the same
AssigneeAgency for Science, Technology and Research
InventorsShiyang Zhu, Chih-Kuo Tseng, Ting Hu, Zhengji Xu, Yuan Dong, Alex Yuandong Gu
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Abstract
Various embodiments may provide a method of fabricating a meta-lens structure. The method may include forming a first dielectric layer in contact with a silicon wafer. The method may also include forming a second dielectric layer in contact with the first dielectric layer. A refractive index of the second dielectric layer may be different from a refractive index of the first dielectric layer. The method may further include, in patterning the second dielectric layer. The method may additionally include removing at least a portion of the silicon wafer to expose the first dielectric layer.
Claims18
A method of fabricating a meta-lens structure, the method comprising:
- forming a first dielectric layer in contact with a silicon wafer;
- forming a second dielectric layer in contact with the first dielectric layer, a refractive index of the second dielectric layer different from a refractive index of the first dielectric layer;
- patterning the second dielectric layer;
- and
- removing at least a portion of the silicon wafer to expose the first dielectric layer,
- wherein the silicon wafer is entirely removed;
- wherein the method further comprises forming a layer of silicon oxide in contact with the second dielectric layer after the second dielectric layer is patterned and before the silicon wafer is entirely removed;
- and
- wherein the method also comprises bonding a wafer to the silicon oxide layer after the silicon oxide layer is formed, and before the silicon wafer is entirely removed.
Dependencies are inferred from the claim text.