Resonantly vibrating accelerometer with cross-coupling signal suppression
AssigneeEmcore Corporation
InventorsSergey Alexandrovich Zotov, Arvind K. Srivastava
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AssigneeEmcore Corporation
InventorsSergey Alexandrovich Zotov, Arvind K. Srivastava
Estimating the term…
An inventive accelerometer includes a proof mass, vibrating sensors, and an excitation-and-detection circuit. The vibrating sensors are substantially identical, and each exhibits corresponding fundamental and higher-order vibrational modes characterized by corresponding fundamental and higher-order resonant mode frequencies. The excitation-and-detection circuit drives each corresponding vibrating sensor at one of its resonant mode frequencies f1 or f2; the vibrational modes driven at the frequencies f1 and f2 are the same for each sensor. Compressive or tensile loads oppositely applied by the proof mass to the vibrating sensors cause a difference frequency Δf=f1−f2 to vary monotonically with acceleration of the apparatus along the sensing axis. The excitation-and-detection circuit includes at least one low-pass filter with a low-pass cut-off frequency fLP that is less than Δf.
An apparatus comprising:
Dependencies are inferred from the claim text.