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US 11,959,806 B2Granted
MEMS sensors and systems
AssigneeObsidian Sensors, Inc.
InventorsJohn Hong, Bing Wen, Edward Chan, Tallis Chang, Sean Andrews
Life of this patent
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Abstract
Disclosed herein are MEMS devices and systems and methods of manufacturing or operating the MEMS devices and systems. In some embodiments, the MEMS devices and systems are used in imaging applications.
Claims20
A microelectromechanical system, comprising:
- a substrate comprising a surface;
- a lid comprising a surface;
- spacers separating the lid and the substrate, wherein each of the spacers is coupled to the surface of the substrate and the surface of the lid;
- a cavity defined by the spacers, the surface of the lid, and the surface of the substrate;
- a pixel in the cavity to detect radiation, the pixel positioned on the surface of the substrate;
- and
- a reflector comprising an antenna structure and a transmission line to:
- direct the radiation to the pixel;
- and
- shift a phase of the radiation.
7 more elements
A method of manufacturing a microelectromechanical system, comprising:
- providing a substrate comprising a surface;
- providing a lid comprising a surface;
- providing spacers to separate the lid and the substrate;
- coupling each of the spacers to the surface of the substrate and the surface of the lid, wherein the spacers, the surface of the lid, and the surface of the substrate define a cavity;
- providing a pixel in the cavity to detect radiation;
- positioning the pixel on the surface of the substrate;
- and
- providing a reflector comprising an antenna structure and a transmission line to:
- direct the radiation to the pixel;
- and
- shift a phase of the radiation.
8 more elements
A method for operating a microelectromechanical system (MEMS), wherein the MEMS comprises:
- a substrate comprising a surface;
- a lid comprising a surface;
- spacers separating the lid and the substrate, wherein each of the spacers is coupled to the surface of the substrate and the surface of the lid;
- a cavity defined by the spacers, the surface of the lid, and the surface of the substrate;
- a pixel in the cavity, the pixel positioned on the surface of the substrate;
- and
- a reflector comprising an antenna structure and a transmission line, wherein the method comprises:
- receiving radiation;
- directing, via the antenna structure and the transmission line, the radiation to the pixel;
- shifting, via the antenna structure and the transmission line, a phase of the radiation;
- and
- detecting, via the pixel, the radiation.
9 more elements
Dependencies are inferred from the claim text.