Valve control device, drive control device, and fluid control device

A fluid control device, comprising:

• a plurality of piezoelectric inertial rotation mechanisms, each of which comprises:
• a rod-shaped rotor provided so as to rotate about a rotation axis and move forward or backward in a direction of the rotation axis by forward or reverse rotation, wherein one end of the rotor is directly or indirectly connected to a valve body, at least a part of the valve body being positioned in a flow path for fluid, wherein the rotor moves in the direction of the rotation axis by rotating the rotor and changes at least either one of a relative position of the valve body with respect to a valve seat that is closed by the valve body or a contact force between the valve body and the valve seat;
• a pair of contacts for sandwiching the rotor, wherein relative movement of the pair of contacts rotates the rotor;
• and
• a moving unit comprising a piezoelectric element for causing the pair of contacts to perform relative movement;
• a drive control unit for controlling, for each of the plurality of piezoelectric inertial rotation mechanisms, at least either one of the relative position of the valve body with respect to the valve seat by applying a voltage waveform to the piezoelectric element so as to cause the rotor to move in the direction of the rotation axis by rotating the rotor in forward or reverse rotation direction by the pair of contacts;
• and
• an air cylinder comprising a main body to which the plurality of piezoelectric inertial rotation mechanisms are attached, and a piston portion arranged in the main body, wherein movement of the piston portion is controlled by changing at least either one of the relative position of the valve body with respect to the valve seat or the contact force between the valve body and the valve seat.