Shunt door for magnets in plasma process chamber

A system comprising:

• a chamber comprising:
• an interior volume and an exterior surface disposed around the interior volume;
• and
• a substrate support in the interior volume;
• a rotational magnetic housing disposed about the chamber, the rotational magnetic housing comprising:
• a sleeve;
• a plurality of magnets coupled to the sleeve, the plurality of magnets configured to travel along a path about the exterior surface of the chamber;
• and
• a plurality of shunt doors disposed between the exterior surface of the chamber and the sleeve;
• and
• a controller configured to execute instructions to cause each of the shunt doors to move relative to the magnets, and to cause the magnets to move relative to the plurality of shunt doors from an open position to a closed position to shield the interior volume of the chamber from magnetic fields from the plurality of magnets when in the closed position and to reduce an intensity of the magnetic fields in the interior volume in the closed position relative to the open position.

A system comprising:

• a chamber comprising:
• a chamber body including an exterior sidewall disposed around an interior volume;
• a chamber lid having a gas distribution assembly configured to provide gas to the interior volume;
• and
• a substrate support positioned in the interior volume opposite the gas distribution assembly;
• a radio frequency (RF) source operable to be coupled to an electrode disposed within substrate support;
• and
• a rotational magnetic housing disposed about the exterior sidewall of the chamber, the rotational magnetic housing comprising:
• a sleeve;
• a plurality of magnets coupled to the sleeve that are configured to travel along a path around the chamber when the rotational magnetic housing is rotated around the chamber;
• and
• a plurality of shunt doors movably disposed between the chamber and the sleeve;
• and
• a controller configured to execute instructions to cause each of the shunt doors to move relative to the magnets from an open position to a closed position to shield the interior volume of the chamber from magnetic fields from the plurality of magnets when the plurality of shunt doors are in the closed position to reduce an intensity of the magnetic fields in the interior volume in the closed position relative to the open position.