Methods of fabricating thin films comprising lithium-containing materials

A method, comprising:

• (1) inducing formation of a first vapor from a first target comprising a lithium-containing material and formation of a second vapor from a second target comprising lithium and nitrogen such that the first vapor and the second vapor are deposited on a surface, resulting in the formation of a thin film comprising a lithium-containing material on the surface,
• wherein:
• the formation of the first vapor and the formation of the second vapor are induced sequentially,
• at least a portion of the formation of the first vapor and at least a portion of the formation of the second vapor occur under vacuum conditions,
• the thin film on the surface comprises:
• (a) nitrogen at a lattice site, and/or
• (b) interstitial nitrogen, and
• the thin film on the surface comprises a multilayer film comprising alternating layers of a first layer comprising the lithium-containing material of the thin film and a second layer comprising lithium and nitrogen;
• and
• (2) removing a majority of nitrogen in the multilayer film and/or merging the alternating layers.