Photocurable composition, method for producing concave-convex structure, method for forming fine concave-convex pattern, and concave-convex structure
AssigneeMitsui Chemicals, Inc.
InventorsTakashi Oda, Hisanori Ohkita, Hiroko Wachi, Shingo Yamamoto
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Abstract
Provided is a photocurable composition used for forming a resin layer of a concave-convex structure including a substrate and a resin layer provided on the substrate and having fine concavities and convexities formed on a surface thereof. A cured film of the photocurable composition has a surface free energy of 15 mJ/m2 to 40 mJ/m2 as measured based on the Kitazaki-Hata theory and a hardness of 0.05 GPa to 0.5 GPa as measured using a nanoindenter.
Claims12
A photocurable composition used for forming a resin layer of a concave-convex structure including a substrate and a resin layer provided on the substrate and having fine concavities and convexities formed on a surface thereof,
- wherein the photocurable composition has a surface free energy of 15 mJ/m2 to 40 mJ/m2 as measured by the following evaluation method 1, and a hardness of 0.05 GPa to 0.5 GPa as measured by the following evaluation method 2,
- (evaluation method 1)
- in which first, the photocurable composition is coated on a substrate to form a photocurable film, which is then irradiated with ultraviolet rays to obtain a cured film;
- next, contact angles of water, diiodomethane, and 1-bromonaphthalene with respect to the cured film are measured using a contact angle meter;
- and
- then, the surface free energy is calculated from a Kitazaki-Hata theory, and
- (evaluation method 2)
- in which first, a cured film is obtained in the same manner as in the evaluation method 1;
- and
- next, using a nanoindenter, a Berkovich indenter is pressed against the cured film, and the hardness is calculated from a value of the detected stress.
Dependencies are inferred from the claim text.