Dual-layer micro-ribbon MEMS light modulator

An optical system comprising:

• a light source;
• and
• a microelectromechanical system (MEMS) device operable to receive and modulate light from the light source, the MEMS device comprising:
• a substrate having an upper surface;
• a top modulating layer including a number of light modulating micro-ribbons, each light modulating micro-ribbon supported above and separated from the upper surface of the substrate by a number of spring structures in at least one lower actuating layer;
• and
• a mechanism for moving one or more of the number of light modulating micro-ribbons relative to the upper surface of the,
• wherein the number of spring structures are operable to enable the number of light modulating micro-ribbons to move continuously and vertically relative to the upper surface of the substrate while maintaining the number of light modulating micro-ribbons substantially parallel to one another and the upper surface of the substrate.

A method of fabricating a dual-layer microelectromechanical systems (MEMS) device, the method comprising:

• depositing and patterning a first sacrificial layer over an upper surface of a substrate, said patterning including forming first post holes extending through the first sacrificial layer to the upper surface of the substrate;
• depositing and patterning an actuator layer over the first sacrificial layer to fill the first post holes and form a plurality of spring structures coupled to the upper surface by first posts;
• depositing and patterning a second sacrificial layer over the actuator layer, said patterning including forming second post holes;
• depositing and patterning a top modulating layer over the second sacrificial layer to fill the second post holes and form a number of light modulating micro-ribbons, each light modulating micro-ribbon coupled to a number of the plurality of spring structures by second posts;
• and
• removing the first and second sacrificial layers to release the number of light modulating micro-ribbons and plurality of spring structures,
• wherein the plurality of spring structures are operable to enable the number of light modulating micro-ribbons to move continuously and vertically relative to the upper surface of the substrate while maintaining the number of light modulating micro-ribbons substantially parallel to one another and the upper surface of the substrate.