Laser processing device
AssigneeNippon Telegraph and Telephone Corporation
InventorsSohan Kawamura, Tadayuki Imai, Soichi Oka
Life of this patent
Estimating the term…
Abstract
On an optical path of a condensing lens (101), a varifocal lens (102) is disposed. The varifocal lens (102) is formed of an electro-optic crystal such as, e.g., potassium tantalate niobate. A condensation position measurement unit (103) measures a condensation position where laser light is condensed by the condensing lens (101). A condensation position control unit (104) controls a focal position of the varifocal lens (102) such that a difference between the condensation position measured by the condensation position measurement unit (103) and a prescribed condensation position that has been set falls within an acceptable range.
Claims12
A laser processing device comprising:
- a condensing lens configured to condense laser light supplied from a light source onto a surface of a structure to irradiate the surface of the structure;
- a varifocal lens disposed on an optical path of the condensing lens;
- a condensation position measurement device configured to measure the laser light at a position between the condensing lens and the structure and measure a condensation position where the laser light is condensed by the condensing lens based on the laser light measured at the position between the condensing lens and the structure;
- and
- a condensation position controller configured to control a focal position of the varifocal lens such that a difference between the condensation position measured by the condensation position measurement device and a prescribed condensation position falls within a first preset acceptable range.
A method of operating a laser processing device, the method comprising:
- condensing, by a condensing lens of the laser processing device, laser light supplied from a light source onto a surface of a structure to irradiate the surface of the structure, wherein the laser processing device comprises a varifocal lens disposed on an optical path of the condensing lens;
- measure the laser light at a position between the condensing lens and the structure;
- measure, by the laser processing device, a condensation position where the laser light is condensed by the condensing lens based on the laser light measured at the position between the condensing lens and the structure;
- and
- controlling, by the laser processing device, a focal position of the varifocal lens such that a difference between the condensation position and a prescribed condensation position falls within a first preset acceptable range.
Dependencies are inferred from the claim text.