Spin chuck jig and method of lifting spin chuck using the same
AssigneeSamsung Electronics Co., Ltd.
InventorsMichael D. Ybarra, Elijah L. Rhoades
Life of this patent
Estimating the term…
Abstract
A spin chuck jig includes a handle having first holes, a base having second holes, wherein a number of the second holes and a number of first holes are the same, and bolts each penetrating one of the first holes and one of the second holes so that the handle and the base are attached to a spin chuck to be lifted from a spin process equipment.
Claims18
A method of lifting a spin chuck from a spin process equipment, the method comprising:
- inserting a base having a plurality of first holes into a recessed region of the spin chuck;
- placing a handle having a plurality of second holes on a top surface of the base;
- inserting one of a plurality of bolts into a corresponding one of the plurality of first holes, into one of a plurality of bolt receptors of the spin chuck, and a corresponding one of the plurality of second holes to attach the base and the handle to the spin chuck;
- and
- lifting the spin chuck using the handle.
A method of lifting a spin chuck from a spin process equipment, the method comprising:
- inserting a base having a plurality of first holes into a recessed region of the spin chuck, the recessed region including a plurality of bolt receptors arranged within;
- placing a handle having a plurality of second holes on a top surface of the base, wherein a number of the plurality of second holes and a number of the bolt receptors are the same;
- inserting one of a plurality of bolts into a corresponding one of the plurality of first holes and a corresponding one of the plurality of second holes to attach the base and the handle to the spin chuck,
- wherein a length of one of the plurality of bolts is sufficiently long to penetrate the corresponding one of the plurality of first holes, the corresponding one of the plurality of second holes, and a corresponding one of the plurality of bolt receptors;
- and
- lifting the spin chuck using the handle.
A method of lifting a spin chuck from a spin process equipment, the method comprising:
- releasing the spin chuck from a supporting rotating shaft;
- inserting a base having at least one first hole into a recessed region of the spin chuck;
- placing a handle having at least one second hole on a top surface of the base;
- aligning one of the at least one first hole and a corresponding one of the at least one second hole;
- inserting at least one bolt into the one of the at least one first hole and the corresponding one of the at least one second hole to attach the base and the handle to the spin chuck,
- wherein the at least one bolt penetrates the one of the at least one first hole, the corresponding one of the at least one second hole, and a corresponding one of at least one bolt receptor simultaneously;
- and
- lifting the spin chuck using the handle.
Dependencies are inferred from the claim text.