Chemical liquid purification method and chemical liquid
AssigneeFUJIFILM Corporation
InventorsTetsuya Kamimura, Masahiro Yoshidome, Yukihisa Kawada
Life of this patent
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Abstract
An object of the present invention is to provide a chemical liquid purification method which makes it possible to obtain a chemical liquid having excellent defect inhibition performance. Another object of the present invention is to provide a chemical liquid. The chemical liquid purification method according to an embodiment of the present invention is a chemical liquid purification method including obtaining a chemical liquid by purifying a substance to be purified containing an organic solvent, in which a content of the stabilizer in the substance to be purified with respect to the total mass of the substance to be purified is equal to or greater than 0.1 mass ppm and less than 100 mass ppm.
Claims6
A chemical liquid comprising:
- an organic solvent;
- a stabilizer;
- at least one kind of metal ions selected from a group consisting of Fe, Cr, Pb, and Ni, and
- at least one kind of metal particles selected from a group consisting of Fe, Cr, Pb, and Ni,
- wherein a content of the stabilizer with respect to a total mass of the chemical liquid is 0.1 to 50 mass ppm,
- in a case where the chemical liquid contains one kind of the at least one kind of metal ions, a content of the at least one kind of metal ions with respect to the total mass of the chemical liquid is equal to or smaller than 100 mass ppt,
- in a case where the chemical liquid contains two or more kinds of the at least one kind of metal ions, a content of each of the at least one kind of metal ions with respect to the total mass of the chemical liquid is equal to or smaller than 100 mass ppt,
- in a case where the chemical liquid contains one kind of the at least one kind of metal particles, a content of the at least one kind of metal particles with respect to the total mass of the chemical liquid is equal to or smaller than 100 mass ppt, and
- in a case where the chemical liquid contains two or more kinds of the at least one kind of metal particles, a content of each of the at least one kind of metal particles with respect to the total mass of the chemical liquid is equal to or smaller than 100 mass ppt.
Dependencies are inferred from the claim text.