Tunable bandpass filter for millimeter-wave signals

A method of fabricating a tunable passband filter comprising:

• constructing a first high-pass section comprising a first tunable MEMS switch array comprising a first plurality of MEMS switches arranged in parallel between a first switch array input junction and a first switch array output junction, wherein a capacitance of the first tunable MEMS switch array varies as a function of a first bias voltage applied to the first plurality of MEMS switches;
• providing a second high-pass section comprising a second tunable MEMS switch array comprising a second plurality of MEMS switches arranged in parallel between a second switch array input junction and a second switch array output junction, wherein a capacitance of the second tunable MEMS switch array varies as a function of a fourth bias voltage applied to the second plurality of MEMS switches;
• providing a low-pass section comprising:
• a high impedance line;
• a first tunable MEMS bridge array comprising a first plurality of fixed MEMS bridges arranged in series between the first switch array output junction and a first end of the high impedance line, wherein a capacitance of the first tunable MEMS bridge array varies as a function of a second bias voltage applied to the first plurality of fixed MEMS bridges;
• and
• a second tunable MEMS bridge array comprising a second plurality of fixed MEMS bridges arranged in series between the second switch array input junction and a second end of the high impedance line, wherein a capacitance of the second tunable MEMS bridge array varies as a function of a third bias voltage applied to the second plurality of fixed MEMS bridges,
• wherein each of the first high-pass section, the second high-pass section, and the low-pass section are positioned between a signal input port configured to receiving an input radio frequency (RF) signal and a signal output port configured to transmit a filtered output RF signal, wherein the tunable passband filter is configured to filter the input RF signal to yield the filtered output RF signal.